Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 8, 2021
Patent Application Number
16235927
Date Filed
December 28, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
A microelectromechanical microphone includes: a substrate; a sensor chip, integrating a microelectromechanical electroacoustic transducer; and a control chip operatively coupled to the sensor chip. In one embodiment, the sensor chip and the control chip are bonded to the substrate, and the sensor chip overlies, or at least partially overlies, the control chip. In another embodiment, the sensor is bonded to the substrate and a barrier is located around at least a portion of the sensor chip.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
