Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junichiro Kozaki0
Date of Patent
June 15, 2021
Patent Application Number
16664829
Date Filed
October 26, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
A vacuum valve for driving a valve body arranged facing a valve opening up and down relative to the valve opening to perform valve opening/closing operation, comprises: a first up-down driver configured to drive the valve body up and down with a first minimum drivable amount; and a second up-down driver configured to drive the valve body up and down with a second minimum drivable amount smaller than the first minimum drivable amount.
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