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US Patent 11036911 Charging prevention method and structure
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Patent
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Date Filed
December 30, 2019
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Date of Patent
June 15, 2021
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Patent Application Number
16730406
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Patent Citations
US Patent 10552567 Automated redesign of integrated circuits using relaxed spacing rules
US Patent 10170322 Atomic layer deposition based process for contact barrier layer
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US Patent 10777510 Semiconductor device including dummy via anchored to dummy metal layer
US Patent 10043966 Semiconductor device including via plugs
US Patent 10163691 Low-K dielectric interconnect systems
Patent Inventor Names
Yen-Sen Wang
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Chung-Yi Lin
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Han-Chung Lin
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11036911
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Patent Primary Examiner
Nha T Nguyen
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