US Patent 11041878 Three dimensional sensing element suspension method and measurement system

Methods of determining movement and devices that can be configured to function as an accelerometer, a gyroscope or a magnetometer and is comprised of a sensing element suspended by acoustic waves, and a measurement system capable of determining the position, or rotation of the sensing element without introducing any residual force on the sensing element. The acoustic suspension of the sensing element provides a virtually friction, and torque free method of constraining the sensing element, but not hindering its ability to sense accelerations, rotations or magnetic fields.