Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 29, 2021
Patent Application Number
16586597
Date Filed
September 27, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments disclosed herein include a source for a processing tool. In an embodiment, the source comprises a dielectric plate having a first surface and a second surface opposite from the first surface, and a cavity into the first surface of the dielectric plate. In an embodiment, the cavity comprises a third surface that is between the first surface and the second surface. In an embodiment, the source further comprises a dielectric resonator extending away from the third surface.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.