Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yohei Yamaguchi0
Osamu Karikome0
Ryohei Takaya0
Tomoyuki Ariyoshi0
Kazufumi Watabe0
Date of Patent
July 13, 2021
Patent Application Number
15649126
Date Filed
July 13, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention allows stable fabrication of a TFT circuit board used in a display device and having thereon an oxide semiconductor TFT. A TFT circuit board includes a TFT that includes an oxide semiconductor. The TFT has a gate insulating film formed on part of the oxide semiconductor and a gate electrode formed on the gate insulating film. A portion of the oxide semiconductor that is covered with the gate electrode 104 and a portion of the oxide semiconductor that is not covered with the gate electrode are both covered with a first interlayer insulating film. The first interlayer insulating film is covered with a first film 106, and the first film is covered with a first AlO film.
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