US Patent 11067200 Self-healing microvalve

Self-healing microvalves are described herein. The self-healing microvalve can move from a first position to a second position using an electrical input and use a soft hydraulic assembly to return from the second position to the first position. The electrical input can create an electrostatic attraction, causing the compression of the soft hydraulic assembly and movement of the valve gate to seal the microvalve. The elasticity of the soft hydraulic assembly can then return the self-healing microvalve to the original state, once the electrical input is removed.