Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stanley Shin0
Kai-Hsiang Chang0
Keith Kuang-Kuo Koai0
Sheng Cho Lin0
Date of Patent
July 20, 2021
0Patent Application Number
159040750
Date Filed
February 23, 2018
0Patent Primary Examiner
Patent abstract
An apparatus for inspecting a wafer process chamber is disclosed. In one example, the apparatus includes: a sensor, a processor, and a lifetime predictor. The sensor captures information about at least one hardware part of the wafer process chamber. The processor processes the information to determine a hardware condition of the at least one hardware part. The lifetime predictor predicts an expected lifetime left for the at least one hardware part based on the hardware condition.
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