US Patent 11072051 Platen rotation method
Patent 11072051 was granted and assigned to Taiwan Semiconductor Manufacturing Company on July, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A method of controlling platen rotation includes receiving an electrical energy input at a rotator assembly, using the rotator assembly to increase a rotational kinetic energy of a platen based on the electrical energy input, using the rotator assembly to decrease the rotational kinetic energy of the platen, and generating an electrical energy output of the rotator assembly based on the decreased rotational kinetic energy of the platen.
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Patent Inventor Names
Bruce Cho0
Chia-Ying Tien0
Huang-Chu Ko0
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US Patent 11072051 Platen rotation method
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Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11072051
Date of patent
July 27, 2021
Patent application number
16740809
Date Filed
January 13, 2020
Patent primary examiner
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