US Patent 11090921 Peeling method of resin sheet

Patent 11090921 was granted and assigned to Disco Corporation on August, 2021 by the United States Patent and Trademark Office.

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Patent abstract

There is provided a peeling method of a resin sheet for peeling off the resin sheet from a plate-shaped object to which the resin sheet is stuck. The peeling method includes a resin sheet heating step of heating an end part of the resin sheet of the plate-shaped object to which the resin sheet is stuck to turn up the resin sheet from the end part and form a peeling origin point and a resin sheet removal step of removing the resin sheet from the plate-shaped object through peeling off the resin sheet from the peeling origin point.

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Patent Inventor Names

Yoshinobu Saito0

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