US Patent 11092654 Measuring a leakage characteristic of a signal path

The systems determine the parasitic capacitance of a signal path. That parasitic capacitance is then used to determine a leakage characteristic of the signal path, such as leakage current or leakage resistance. The capability of ATE channels to force current accurately, and to measure time intervals at prescribed voltages, can be used to multiply the accuracy of the force current function. Using these resources, small leakage currents—for example, on the order of 10 nA or less—can be measured.