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US Patent 11114380 Manufacturing method of memory device

Patent 11114380 was granted and assigned to Winbond Electronics on September, 2021 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Patent Applicant
Winbond Electronics
Winbond Electronics
Current Assignee
Winbond Electronics
Winbond Electronics
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11114380
Date of Patent
September 7, 2021
Patent Application Number
20190916
Date Filed
September 16, 2019
Patent abstract

A memory device and a manufacturing method thereof are provided. The memory device includes a word line, a bit line, an active region and a bit line contact structure. The word line is disposed in the substrate, and extends along a first direction. The bit line is disposed over the substrate, and extends along a second direction. The active region is disposed in the substrate, and extends along a third direction. The bit line contact structure is disposed between the active region and the bit line. A top view pattern of the bit line contact structure has a long axis. An angle between the extending direction of this long axis and the third direction is less than an angle between the extending direction of this long axis and the first direction, and is less than an angle between the extending direction of this long axis and the second direction.

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