US Patent 11119255 Highly efficient data representation of dense polygonal structures

A method of generating a layout data file for a metasurface device is disclosed. At a radial position of a metasurface device, the method determines a primitive cell of a first level having a metasurface feature pattern that is repeated around an arc corresponding to a circumference at the radial position. The method generates metasurface structures of higher levels. Each metasurface structure of a higher level includes multiple references to a structure or a primitive cell of a next lower level. The method stores at least a portion of a layout of the metasurface device to a layout data file. The layout includes references to metasurface structures of two or more of the higher levels.