US Patent 11121017 Load port module

Patent 11121017 was granted and assigned to Brooks Automation on September, 2021 by the United States Patent and Trademark Office.

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Patent

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Patent Applicant

Brooks Automation

Current Assignee

Brooks Automation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

111210170

Date of Patent

September 14, 2021

Patent Application Number

201408290

Date Filed

August 29, 2014

Patent Citations Received

‌

US Patent 12068186 Load port module

Patent abstract

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

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