Patent attributes
A lower base surface of wirings includes a stepped portion with upper surfaces having mutually different heights and stepped surfaces rising from respective upper surfaces. Each upper surface and the stepped surface form a projecting portion rising in each normal direction and constitute a first recessed corner portion immediately below the wirings and a second recessed corner portion at the tip of the projecting portion in the normal direction of the stepped surface. A first interval exists between the adjacent wirings. The first recessed corner portion has a first height. The second recessed corner portion has a second height and a second width in the first direction. The second width is smaller than the first interval, the second height is lower than the first height, or both the second width is smaller than the first interval and the second height is lower than the first height.
