US Patent 11133186 Processing method of workpiece

Patent 11133186 was granted and assigned to Disco Corporation on September, 2021 by the United States Patent and Trademark Office.

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Patent

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Patent Applicant

Disco Corporation

Current Assignee

Disco Corporation

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11133186

Date of Patent

September 28, 2021

Patent Application Number

20190124

Date Filed

January 24, 2019

Patent abstract

There is provided a processing method of a workpiece. In the processing method, a protective film including a water-insoluble resin is formed on the front surface of a workpiece and the workpiece on which the protective film is formed is processed. Furthermore, the protective film is deteriorated by supplying an organic solvent to the workpiece processed and the protective film is removed from the front surface of the workpiece by supplying cleaning water to the protective film deteriorated.

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