US Patent 11133788 Bonded body and elastic wave element
Patent 11133788 was granted and assigned to NGK Insulators on September, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A bonded body includes: a piezoelectric single crystal substrate; a supporting substrate composed of a single crystal silicon; a bonding layer—provided between the supporting substrate and piezoelectric single crystal substrate and having a composition of Si(1-x)Ox (0.008≤x≤0.408); and an amorphous layer provided between the supporting substrate and bonding layer and containing silicon atoms, oxygen atoms, and argon atoms. The concentration of the oxygen atoms in an end part of the amorphous layer on a side of the bonding layer is higher than the average concentration of the oxygen atoms in the bonding layer.
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111337880
Date of Patent
September 28, 2021
0Patent Application Number
202012210
Date Filed
December 21, 2020
0Official Website
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111337880
Date of Patent
September 28, 2021
0Patent Application Number
202012210
Date Filed
December 21, 2020
0Official Website
Edits on 6 Jun, 2022
Golden AI
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Edits on 30 Sep, 2021
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US Patent 11133788 Bonded body and elastic wave element
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11133788
Date of patent
September 28, 2021
Patent application number
20201221
Date Filed
December 21, 2020
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