Patent attributes
A method of manufacturing a semiconductor device includes: providing a first member comprising: a first substrate, a semiconductor layer disposed on the first substrate and defining a first recess, and a first metal layer disposed above at least a portion other than the first recess, the first member defining a second recess in a region of a surface of the first member including a region directly above the first recess; providing a second member comprising: a second substrate, a second metal layer on or above the second substrate, a third metal layer on the second metal layer, and a fourth metal layer on the third metal layer; and bonding the first member and the second member together by heating the first metal layer and the fourth metal layer while facing each other. The third metal layer impedes interdiffusion between the second metal layer and the fourth metal layer.
