US Patent 11159140 Hybrid structure for a surface acoustic wave device
Patent 11159140 was granted and assigned to Soitec on October, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a free first surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer. The hybrid structure further comprises a trapping layer disposed between the useful layer and the support substrate, and at least one functional interface of predetermined roughness between the useful layer and the trapping layer.
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Patent Inventor Names
Gweltaz Gaudin0
Isabelle Huyet0
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Patent Number
111591400
Date of Patent
October 26, 2021
0Patent Application Number
201706260
Date Filed
June 26, 2017
0Official Website
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US Patent 11159140 Hybrid structure for a surface acoustic wave device
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11159140
Date of patent
October 26, 2021
Patent application number
20170626
Date Filed
June 26, 2017
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