Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
November 9, 2021
Patent Application Number
20190628
Date Filed
June 28, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.
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