Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Katsuhiro Sato0
Yuji Hashimoto0
Shinsuke Muraki0
Hiroaki Ashidate0
Satoshi Nakaoka0
Date of Patent
November 9, 2021
Patent Application Number
20190822
Date Filed
August 22, 2019
Patent Primary Examiner
Patent abstract
A substrate treatment apparatus according to an embodiment includes a treatment tank, a container, a measuring instrument, and a controller. The treatment tank stores a chemical solution to treat a substrate. The container contains a liquid including ammonia from which a gas discharged from the treatment tank is gas-liquid separated. The measuring instrument measures an amount of the ammonia included in the liquid over time. The controller controls the treatment of the substrate based on the amount of the ammonia.
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