Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Einstein Noel Abarra0
Date of Patent
November 16, 2021
0Patent Application Number
164125730
Date Filed
May 15, 2019
0Patent Primary Examiner
Patent abstract
A film forming apparatus includes: a processing chamber; a sputtered particle emitter; a substrate mounting unit; and a sputtered particle shielding plate that is provided between the sputtered particle emitter and the substrate mounting unit and has a passage hole that allows the sputtered particles emitted from the sputtered particle emitter to pass through and allows the sputtered particles to be obliquely incident on a substrate mounted on the substrate mounting unit.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
