US Patent 11175472 Three-dimensional dynamic adjustment and locking mechanism

Disclosed is a three-dimensional adjustment mechanism for performing precise adjustment of an optical element in a high-resolution imaging system. The three-dimensional adjustment mechanism includes three elastic adjustment members uniformly distributed to conduct an axial displacement adjustment and a tilt adjustment of the optical element. The three elastic adjustment members are uniformly arranged at a bottom of the optical element, and configured to perform dynamic adjustment for the optical element with high precision on basis of deformations of the elastic adjustment members.