Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jincheng Wang0
Wyatt Owen Davis0
Michael James Nystrom0
Date of Patent
November 16, 2021
0Patent Application Number
165386940
Date Filed
August 12, 2019
0Patent Primary Examiner
Patent abstract
A system that includes a substrate for microelectromechanical system (MEMS) scanning mirror systems is provided. The MEMS scanning mirror system includes a substrate that includes a ceramic body. An actuator frame is mounted on the ceramic body of the substrate. The actuator frame includes at least one moveable member. At least one actuator is operatively connected to the at least one moveable member such that the actuator is configured to move the at least one moveable member. A scanning mirror assembly is mounted to the at least one moveable member such that movement of the at least one moveable member moves the scanning mirror assembly.
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