US Patent 11175595 Method for localizing assembly errors
Patent 11175595 was granted and assigned to Carl Zeiss SMT on November, 2021 by the United States Patent and Trademark Office.
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Patent abstract
A method localizes assembly errors during the arrangement and/or the assembly of in particular vibration-isolated structural elements, in particular of components of optical arrangements, preferably of microlithographic projection exposure apparatuses.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111755950
Date of Patent
November 16, 2021
0Patent Application Number
165759850
Date Filed
September 19, 2019
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
111755950
Date of Patent
November 16, 2021
0Patent Application Number
165759850
Date Filed
September 19, 2019
0Official Website
Patent Primary Examiner
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Edits on 19 Nov, 2021
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US Patent 11175595 Method for localizing assembly errors
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
11175595
Date of patent
November 16, 2021
Patent application number
16575985
Date Filed
September 19, 2019
Patent primary examiner
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