Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jennifer Y. Sun0
Michael R. Rice0
Xiaowei Wu0
Date of Patent
November 23, 2021
0Patent Application Number
162113350
Date Filed
December 6, 2018
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
Certain embodiments of the present disclosure relate to coated articles and methods of coating articles. In one embodiment, a coated article comprises an article adapted for use in a processing chamber, and a coating formed on exterior and interior surfaces of the article. In one embodiment, the coating comprises a rare earth metal-containing ceramic, and the coating is substantially uniform, conformal, and porosity-free.
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