US Patent 11180854 Thin film deposition preparation device and method
Patent 11180854 was granted and assigned to University of Electronic Science and Technology of China on November, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 24, 2019
0
Date of Patent
November 23, 2021
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Patent Applicant
Patent Application Number
16283809
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Patent Inventor Names
Yanrong Li
0
Fei Zhang
0
Jie Xiong
0
Xiaohui Zhao
0
Bowan Tao
0
Chaoren Li
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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