Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yung-Ho Alex Chuang0
Vladimir Dribinski0
Date of Patent
November 23, 2021
Patent Application Number
14248045
Date Filed
April 8, 2014
Patent Citations Received
Patent Primary Examiner
Patent abstract
The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.
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