US Patent 11181509 Sensing sensor

To provide a technique for expanding a measurement dynamic range and performing a stable detection in a sensing sensor using a crystal resonator. A spacer is disposed between an oscillator circuit that oscillates a crystal resonator and a base body that cools an oscillator circuit to a cryogenic temperature, and an oscillator circuit board includes a heater resistor that heats the oscillator circuit. Therefore, the temperature of the oscillator circuit that does not fall below a functional limit temperature and is a low temperature as much as possible can be provided. A negative resistance of the oscillator circuit can be increased, the measurement dynamic range can be expanded, and the crystal resonator can be stably oscillated.