Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Timur Misyuryaev0
Igor Bragin0
Paul Van Der Wilt0
Date of Patent
November 23, 2021
0Patent Application Number
167965870
Date Filed
February 20, 2020
0Patent Primary Examiner
Patent abstract
Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.
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