Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen-Cheng Kuo0
Chun-Wen Cheng0
Chun-Yin Tsai0
Tzu-Heng Wu0
Chia-Hua Chu0
Date of Patent
November 23, 2021
0Patent Application Number
168139230
Date Filed
March 10, 2020
0Patent Primary Examiner
Patent abstract
An integrated microphone device is provided. The integrated microphone device includes a substrate, a plate, and a membrane. The substrate includes an aperture allowing acoustic pressure to pass through. The plate is disposed on a side of the substrate. The membrane is disposed between the substrate and the plate and movable relative to the plate as acoustic pressure strikes the membrane. The membrane includes a vent valve having an open area that is variable in response to a change in acoustic pressure.
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