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US Patent 11187607 Apparatus and method for calibrating a pressure sensing device

Patent 11187607 was granted and assigned to Infineon Technologies on November, 2021 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Patent Applicant
Infineon Technologies
Infineon Technologies
Current Assignee
Infineon Technologies
Infineon Technologies
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11187607
Date of Patent
November 30, 2021
Patent Application Number
16293052
Date Filed
March 5, 2019
Patent Primary Examiner
‌
Tarun Sinha
Patent abstract

An apparatus for calibrating a pressure sensing device having a pressure sensor and a temperature compensation device includes: a chamber for applying a variable temperature and a variable pressure to the pressure sensing device; a temperature regulation device for regulating the temperature in the chamber designed such that the temperature in the chamber respectively increases in a strictly monotonous manner or falls in a strictly monotonous manner during one or more time intervals; a pressure regulation device for regulating the pressure in the chamber designed such that the pressure in the chamber respectively monotonously increases or respectively monotonously falls in at least one of the time intervals during a plurality of sub-intervals of the one-time interval; a reference pressure sensor for sensing the pressure in the chamber during the time interval(s); and a data record generation device for generating corresponding data records.

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