US Patent 11187740 Time dependent dielectric breakdown test structure and test method thereof

A time dependent dielectric breakdown test structure includes a plurality of test units connected in parallel between a constant voltage and a ground. Each of the plurality of test units includes a dielectric test sample connected to the constant voltage; and a current restraint unit connected between the dielectric test sample and the ground, for restraining a breakdown current from flowing on the dielectric test sample after the constant voltage has broken the dielectric test sample.