Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
William Green0
Abram L. Falk0
Damon B. Farmer0
Jessie C. Rosenberg0
Date of Patent
November 30, 2021
0Patent Application Number
163975490
Date Filed
April 29, 2019
0Patent Primary Examiner
Patent abstract
A spatial light modulator (SLM) is provided that includes an optical resonator (i.e., pixel) having nanoscale size. The optical resonator having nanoscale size includes a phase-change material such as, for example, a GeSbTe alloy, sandwiched between silicon nitride cladding layers. The phase-change material can undergo a crystalline-to-amorphous phase transition which is characterized by a large change in optical properties of the resonator.
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