US Patent 11187890 Movable diffraction element and spectroscope

A movable diffraction element and a spectroscope. The movable diffraction element includes a movable component having a comb-like shape, a supporting unit configured to support the movable component, a first cantilever actuator coupled to the supporting unit, a displacement determiner coupled to an edge of the first cantilever actuator, and a second cantilever actuator disposed parallel to the first cantilever actuator. In the movable diffraction element, a slope generated when the second cantilever actuator deforms is approximately equivalent to a slope generated at the first cantilever actuator. The spectroscope includes the movable diffraction element.