Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Seung Keun Jun0
Bo Seung Hwang0
Date of Patent
November 30, 2021
0Patent Application Number
164391610
Date Filed
June 12, 2019
0Patent Primary Examiner
Patent abstract
A stocker may include a load port which a cassette for receiving wafers is either loaded on or unloaded from, an aligner configured to align the wafers and to confirm identification codes of the wafers, a plurality of shelves each having slots for receiving the wafers, a first transfer robot having a first robot arm for transferring the wafers between the load port and the aligner and a second transfer robot having a second robot arm for transferring the wafers between the aligner and the shelves.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
