US Patent 11227747 Etch process with rotatable shower head
Is a
Date Filed
October 18, 2019
0
Date of Patent
January 18, 2022
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Patent Application Number
16657503
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Patent Citations
Patent Inventor Names
Yu-Chi Lin
0
Hung-Jui Chang
0
Yi-Wei Chiu
0
Yu Lun Ke
0
Chin-Hsing Lin
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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