Patent attributes
An apparatus and a method performing work free from variations among a plurality of work heads having individual differences. A working apparatus includes a number n (a natural number 2 or greater) of work heads, a stage retaining a work object, drive devices moving the stage and the work heads relative to each other in three directions, a work amount measurement device measuring a work amount of each work head, and a control device, wherein the first-direction drive device enables the number n of work heads to be independently moved in a first direction, and the second-direction drive device includes a second-direction main drive device moving the number n of work heads simultaneously in a second direction, and a second-direction auxiliary drive device moving n−1 work heads among the number n of work heads independently in the second direction. A working method is carried out using the working apparatus.
