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US Patent 11231362 Multi-environment polarized infrared reflectometer for semiconductor metrology

Patent 11231362 was granted and assigned to KLA on January, 2022 by the United States Patent and Trademark Office.

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Patent abstract

A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 μm to 20 μm. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.

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