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US Patent 11239054 Multi-beam particle beam system

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
November 16, 2020
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Date of Patent
February 1, 2022
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Patent Application Number
17098965
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Patent Citations
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US Patent 10176965 Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
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US Patent 10354831 Charged particle inspection method and charged particle system
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US Patent 10388487 Method for operating a multi-beam particle microscope
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US Patent 10535494 Particle beam system and method for the particle-optical examination of an object
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US Patent 10541112 Charged particle beam system and method of operating the same
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US Patent 10600613 Particle beam system
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US Patent 10586677 Semiconductor apparatus and charged particle ray exposure apparatus
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US Patent 10622184 Objective lens arrangement usable in particle-optical systems
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US Patent 10062541 Apparatus of plural charged-particle beams
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US Patent 10141160 Apparatus of plural charged-particle beams
Patent Inventor Names
Yanko Sarov
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Erik Essers
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Jan Horn
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Ulrich Bihr
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Christof Riedesel
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11239054
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Patent Primary Examiner
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David E Smith
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