US Patent 11251287 Self-aligned uniform bottom spacers for VTFETS
Is a
Date Filed
April 14, 2020
Date of Patent
February 15, 2022
Patent Application Number
16847938
Patent Inventor Names
Ruilong Xie
0
Eric Miller
0
Hemanth Jagannathan
0
Jay William Strane
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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