US Patent 11256083 MEMS electrostatic actuator with linearized displacements

A microelectromechanical actuator for a light beam steering device is provided that includes memory cells coupled to at least one electronic circuitry component and electrode segments coupled to a respective one of the memory cells via the at least one electronic circuitry component. A flexible metal layer having support pillars is on the electrode segments. Flexible beams are attached to the support pillars and a movable electrode attaches to the flexible beams. A mirror is attached to the movable electrode. When one or more of the electrode segments is activated, the mirror is displaced a distance to steer a light beam output from a light source in a direction.