Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2022
Patent Application Number
15699137
Date Filed
September 8, 2017
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.
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