Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Johannes Franciscus Van Den Brand0
Alessandro Bertolini0
Eric Hennes0
Date of Patent
March 8, 2022
0Patent Application Number
169288510
Date Filed
July 14, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
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