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US Patent 11269202 Optical modulator and package

Patent 11269202 was granted and assigned to Taiwan Semiconductor Manufacturing Company on March, 2022 by the United States Patent and Trademark Office.

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Patent abstract

An optical modulator includes a dielectric layer and a waveguide. The waveguide is disposed on the dielectric layer. The waveguide includes an electrical coupling portion, a slab portion, and an optical coupling portion. The slab portion is sandwiched between the electrical coupling portion and the optical coupling portion. The slab portion has at least two sub-portions having different heights. A maximum height of the slab portion is smaller than a height of the electrical coupling portion.

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