Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yalin Xiong0
Abdurrahman Sezginer0
Grace H. Chen0
Hawren Fang0
Junqing Huang0
Lisheng Gao0
Pavan Kumar0
Xiaochun Li0
Date of Patent
March 8, 2022
0Patent Application Number
159715360
Date Filed
May 4, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Systems and methods increase the signal to noise ratio of optical inspection of wafers to obtain higher inspection sensitivity. The computed reference image can minimize a norm of the difference of the test image and the computed reference image. A difference image between the test image and a computed reference image is determined. The computed reference image includes a linear combination of a second set of images.
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