Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 15, 2022
Patent Application Number
15110130
Date Filed
January 16, 2015
Patent Citations Received
Patent Primary Examiner
CPC Code
A transport apparatus including a frame, a drive section connected to the frame, the drive section having at least one drive axis, at least one arm having an end effector configured for holding a substrate, the at least one arm being connected to the drive section by a transmission link and having at least one degree of freedom axis effecting extension and retraction of the end effector with respect to the at least one arm, and a bearing connected to the frame and the end effector, the bearing defining a guideway that defines the at least one degree of freedom axis.
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