Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthew Ng0
Xiaolei Liu0
Guiqin Wang0
Date of Patent
March 15, 2022
0Patent Application Number
156989170
Date Filed
September 8, 2017
0Patent Citations
Patent Primary Examiner
CPC Code
A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.
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