Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 15, 2022
Patent Application Number
16279639
Date Filed
February 19, 2019
Patent Citations Received
Patent Primary Examiner
A measurement system to be used in a micro-device manufacturing line is equipped with: a plurality of measurement devices which performs measurement processing on each substrate; and a controller that can control the plurality of measurement devices, and the plurality of measurement devices includes at least one first measurement device which acquires position information of a plurality of marks formed on a substrate.
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