US Patent 11274985 Capacitive pressure sensor

A capacitive pressure sensor includes a flexible substrate, a first electrode and a second electrode disposed on one surface of the flexible substrate so as to be spaced apart from each other and located to face each other when the flexible substrate is folded, a dielectric layer interposed between the first electrode and the second electrode, and a signal processing unit disposed on one surface of the flexible substrate and converting a capacitance, which changes as a thickness of the dielectric layer changes by external pressure in a state in which the flexible substrate is folded, into an electrical signal.